| Author | Eakkasit Dumsong |
| Call Number | AIT Diss. no.ME-09-01 |
| Subject(s) | Robotics--Simulation methods
|
| Note | A dissertation submitted in partial fulfillment of the requirements for the degree of Doctor of Engineering in Microelectronics, School of Engineering and Technology |
| Publisher | Asian Institute of Technology |
| Series Statement | Dissertation ; no. ME-09-01 |
| Abstract | This dissertation presents an untethered microrobot based on MEMS with the dimensions of 365 μm x 78 μm. The microrobot consists of three scratch drive actuators and two steering arms. Microrobot is fabricated monolithically by PolyMUMPs process and dielectric material deposition is done as post processing. As a result, advantages can be achieved in the term of mass production, lo wer expenditure and no connection problems encountered when interconnecting discrete subsystems. Stress Engineering 3D Microstructure is a powerful technique to make 3D microstr ucture out-of plane without external manipulation and power consumption to bend micros tructure in each static position. The motion is controlled by deliver ing power via capacitive coupling, with an underlying electric grid, to th e microrobot. With triangular electrical grid platform performing the working environment of micror obot, microrobot receives the same control signal in all location. This way, microrobot can move freely without any restraining tethers. Each steering arm can control independently by hysteresis mechanism. Globally controllable system is provided by finite state machine. The behavior to analyze several aspects of this microrobot using accurate analytical methods, the finite element method and experiment has been investigated. An automa tic release mechanism is provided for mass production. |
| Year | 2009 |
| Corresponding Series Added Entry | Asian Institute of Technology. Dissertation ; no. ME-09-01 |
| Type | Dissertation |
| School | School of Engineering and Technology (SET) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Afzulpurkar, Nitin; |
| Examination Committee(s) | Adisorn Tuantranont ;Lertsak Lekawat ;Chumnarn Punyasai ;Rerngwut Choomuang; |
| Scholarship Donor(s) | Smart MEMS ;NECTEC Project; |
| Degree | Thesis (Ph.D.) - Asian Institute of Technology, 2009 |