Study of process optimization for DLC overcoat by filter cathodic arc deposition | |
| Author | Phuwanai Bunnak |
| Call Number | AIT Thesis no.ISE-09-36 |
| Subject(s) | Magnetic recorders and recording heads Filters and filtration |
| Note | A thesis submitted in partial fulfillment of the requirements for the Degree of Master of Engineering in Microelectronics, School of Engineering and Technology |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ISE-09-36 |
| Abstract | A key technology for magnetic recording is slider head that consist of a small device of writer, and reader but materials used are corrosion sensitive and protective overcoat such as DLC (diamond-like carbon) are applied to prevent corrosion. However, a lowering of the magnetic spacing between heads and media require for higher areal density magnetic recording requires the protective coating thickness to be reduced while maintaining its protective properties against corrosion. Filter cathodic arc (FCA) thin-film deposition technology has been accepted in the manufacturing process because this technique produces energetic ion species that result in high-density DLC films. The primary objective of this thesis is a study of process optimization for DLC overcoat process using FCA deposition technique upon the variation of plasma parameters such as ion density and ion energy using Langmuir probe and time of flight method. The measurement of key parameters of DLC film such as sp3 content was proposed with alternative method to approximate sp3 fraction using ellipsometry with applying Bruggeman Effective Medium Approximation (EMA). |
| Year | 2009 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ISE-09-36 |
| Type | Thesis |
| School | School of Engineering and Technology (SET) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Industrial Systems Engineering (ISE) |
| Chairperson(s) | Dutta, Joydeep |
| Examination Committee(s) | Chanchana Thanachayanont;Krisda Siangchaew |
| Scholarship Donor(s) | Western Digital;NECTEC;Asian Institute of Technology Fellowship |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2009 |