Optimization altic etching process using flowinated gases | |
| Author | Ekawit Hensirisak |
| Call Number | AIT Thesis no.ISE-09-38 |
| Subject(s) | Etching Magnetic recorders and recording Heads |
| Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering (Hard Disc Drive Engineering Technology), School of Engineering and Technology |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ISE-09-38 |
| Year | 2009 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ISE-09-38 |
| Type | Thesis |
| School | School of Engineering and Technology (SET) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Industrial Systems Engineering (ISE) |
| Chairperson(s) | Dutta, Joydeep |
| Examination Committee(s) | Chancana Thanachayanont;Krisada Siangchaew |
| Scholarship Donor(s) | Western Di gital (Thailand) Co., Ltd;NECTEC |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2009 |