Design and simulation of MEMS inertial gyroscope | |
| Author | Suthin Khankhua |
| Call Number | AIT Thesis no.ISE-11-10 |
| Subject(s) | Microelectromechanical systems Gyroscopes |
| Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering in Mechatronics, School of Engineering and Technology |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ISE-11-10 |
| Abstract | In this study, simulation of microelectromechanical system (MEMS) based micro gyroscope has been presented. Simulation has been conducted using CoventorWare. The proposed design has improved the performances and structure for small vibration amplitude to minimize the mechanical crosstalk. The simulation results show that resonance matching of the model which 3.768 kHz for sense mode and 4,156 Hz for driving mode. From model analysis, Oscillations in driving and sensing modes with 1- DOF and proof mass with 2-DOF ensure that the proposed model has no common mode that causes mechanical crosstalk. For voltages analysis, response of drive modes to voltages is increase for displacement if the voltage is increased. While maximum displacement in sense mode of parallel plates is 0.54 um at maximum pull-in voltage is 4.5 Volts, and the capacitance values vary with the change displacement. For damping effects, there are two effects which are squeezed-film damping and slide-film damping. We know that at low frequency these damping not affects on the model except that at high resonance frequency. |
| Year | 2011 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ISE-11-10 |
| Type | Thesis |
| School | School of Engineering and Technology (SET) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Industrial Systems Engineering (ISE) |
| Chairperson(s) | Afzulpurkar, Nitin V. |
| Examination Committee(s) | Manukid Parnichkun;Adisorn Tuantranont |
| Scholarship Donor(s) | RTG Fellowship |
| Degree | Thesis (M. Eng.) - Asian Institute of Technology, 2011 |