Study of air-borne particle count by using scattering light technique | |
| Author | Jeerasak Potham |
| Call Number | AIT Thesis no.ME-09-09 |
| Subject(s) | Light--Scattering Hard disks (Computer science) |
| Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering in Mechatronics, School of Engineering and Technology |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ME-09-09 |
| Abstract | n the road map of clean room control for hard disk drive, require to control a particle in working environment. Now the requirement is down to 200 nm particle instance of 300 nmin some certain area due to head media spacing width down rapidly to nano scale if any particle falling to the recording media during spin it can cause mechanical damage To monitoring the particles in clean room we need to have sufficient techniques to detect the particles in nano size. Light scattering technique is one of the methods to use for detect the unknown particle in clean room environment that allow to detect the particle down to nano size From the scattering size parameter παλ=02am the α>> 1a is the radius of particle,is the refractive index of particle.0mλ is the wavelength of incident light.Scattering light Intensity will follow based on Mie Scattering Theory .The intensity ofscattering light is a function of incident wavelength, particles size, refractive index of particle and scattering angle. This study focus on angle with fix size of particles by using standard particle PSL ,200 nm particle size and using 653 nm incident light source. |
| Year | 2009 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ME-09-09 |
| Type | Thesis |
| School | School of Engineering and Technology (SET) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Lertsak Lekawat |
| Examination Committee(s) | Wanchai Pijitrojana;Bargmann, Brent;Pornchai Rakpongsiri |
| Scholarship Donor(s) | Western Digital (Thailand) Co.,Ltd.;NECTEC;Asian Institute of Technology Fellowship |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2009 |