Design and fabrication of an electrostatic MEMS microactuator for recording head | |
| Author | Don Klaitabtim |
| Call Number | AIT Thesis no.ME-03-04 |
| Subject(s) | Microactuators Design Actuators |
| Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ME-03-04 |
| Abstract | This thesis presents a design concept for the second stage actuator of higher density hard disk drive (HDD). The actuator is fabricated by a microelectromechanical system (MEMS), known as the electrostatic microactuator. The microactuator can be designed based on electrostatic principles. According to MEMS process, the author has selected an electrostatic design in which the microactuator stays between the slider and the suspension. There are three important design factors: higher displacement accuracy, higher resonant frequency, and low voltage supply. The actuator is designed in physical layout with the folded springs, comb drive and a moving plate. After finishing the design, under the finite element analysis is performed to simulate the resulting resonant frequency in condition of low voltage supply for the specification requirement. Final work is testing and verification to determine the fabricated device performance. |
| Year | 2003 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ME-03-04 |
| Type | Thesis |
| School | School of Advanced Technologies (SAT) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Afzulpurkar, Nitin V.;Adisorn Tuantranont |
| Examination Committee(s) | Lertsak Lekawat;Chumnarn Punyasai; |
| Scholarship Donor(s) | Thailand Graduate of Science and Technology (TGIST) National Science;Technology Development Agency ( NSTDA); |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2003 |