Design and fabrication of 2-Axis, high G MEMS micro accelerometer | |
| Author | Akekachai Deesiri |
| Call Number | AIT Thesis no.ME-05-01 |
| Subject(s) | Accelerometers Microelectromechanical systems |
| Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ME-05-01 |
| Abstract | This thesis presents the real design of Micro accelerometer which has a wide application in field Automotive. This design is focused on Surface micromachine design base on MUMPS (Multi-User MEMS Processes) process. Micromachine field has enabled the new era of research, where the most micro circuits can be realized in the real world. The designed has reached the stage of verification and the further scope of this thesis will the testing and changing the design according to the results obtained from testing. This design(Micro accelerometer) has folded spring. Comb drive and proof mass. The finite element analysis has been done to simulate the resonant frequency at the low voltage supply. |
| Year | 2005 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ME-05-01 |
| Type | Thesis |
| School | School of Advanced Technologies (SAT) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Afzulpurkar, Nitin V.; |
| Examination Committee(s) | Adisorn Tuantranont ;Lertsak Lekawat; |
| Scholarship Donor(s) | Sripatum University; |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2005 |