Optimal design and fabrication of MEMs microactuator for recording head | |
| Author | Puttachat Khuntontong |
| Call Number | AIT Thesis no.ME-05-03 |
| Subject(s) | Microelectromechanical systems Microactuators Electrostatics Optimal designs (Statistics) |
| Note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ME-05-03 |
| Abstract | A dual-stage servo system which utilizes a high bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated at low production cost. In this thesis we propose the design of an electrostatic microactuator, which produces sufficient output force to move a conventional slider in a hard disk drive. The slider has typical mass of 1 mg and dimensions of 1200 x 1000 µm in length and width respectively. The actuator is capable of 1 µm displacement at a high frequency more than 20 to 10 times of voice coil motor (VCM) 1 kHz. We have designed and fabricated the microactuator with two technologies, PolyMUMPs and SOI. They have two behaviors of motion design. First design is the transverse motion moving in X axis. Second design is the rotational design moving in angular, direction. |
| Year | 2005 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ME-05-03 |
| Type | Thesis |
| School | School of Advanced Technologies (SAT) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Afzulpurkar, Nitin V.; |
| Examination Committee(s) | Adisorn Tuantranont ;Chittiporn Pupaichitkul ; |
| Scholarship Donor(s) | National Electronics and Computer Technology Center (NECTEC) ;National Science and Technology Development Agency (NSTDA) ; |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2005 |