| Author | Wasinee Mamanee |
| Call Number | AIT Thesis no.ME-05-10 |
| Subject(s) | Microelectromechanical systems
|
| Note | A thesis submitted in partial fulfillment of the requirements for the
degree of Master of Engineering, School of Advanced Technologies |
| Publisher | Asian Institute of Technology |
| Series Statement | Thesis ; no. ME-05-10 |
| Abstract | This study presents a microfabricated device which can be used as a thermopneumatic peristaltic micropump for use in Lab-On-Chip or Micro Total Analysis (µTAS). The device is fabricated by utilizing photolithography and softlithography techniques. The fabricated device is composed of a glass slide-based and Polydimethylsiloxane-based (PDMS) material. This type of micropump performs its function by exploiting thermal energy, which generated by Chromium/Gold heaters on glass slide. There are three heaters aligned, which have physical dimensions of line width 100 µm x height 230 nm approximately. The PDMS-actuation chamber and diaphragm structure are constructed by spinning of PDMS on smooth surface, the thickness can be controlled by spinning speed. PDMS Microchannel was fabricated by using a molding method with a SU-8 negative-resist on Silicon wafer. The width and depth of folded Microchannel was 100 µm and 50 µm, respectively. All components are integrated by Oxygen plasma bonding technique under controlled conditions. The performance of device is tested by the three-phase driving FPGA controlled circuit. The flow is monitored for flow rate measurement. The fabricated micropump is able to produce the optimum fluid flow rate of 0.82 µl/min with the 0.033 Hz, 14 V three-phase input voltages. Therefore, the developed PDMS based micropump is applicable for nano-liter to microliter fluid control systems. |
| Year | 2005 |
| Corresponding Series Added Entry | Asian Institute of Technology. Thesis ; no. ME-05-10 |
| Type | Thesis |
| School | School of Advanced Technologies (SAT) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Afzulpurkar, Nitin V.; |
| Examination Committee(s) | Adisorn Tuantranont ;Lertsak Lekawat ; |
| Scholarship Donor(s) | His Majesty the King's of Thailand; |
| Degree | Thesis (M.Eng.) - Asian Institute of Technology, 2005 |