1 AIT Asian Institute of Technology

Thin film characterisation using optical interferometry

AuthorAgarwal, Simran
Call NumberAIT Caps. Proj. no.EL-15-02
Subject(s)Thin films
Interferometry
Optical interferometers

NoteA capstone project submitted in partial fulfillment of the requirements for the degree of Bachelor of Science in Engineering in Electronics Engineering, School of Engineeringa and Technology
PublisherAsian Institute of Technology
Series StatementCaps. Proj. ; no. EL-15-02
AbstractThe thesis discusses the growing importance of thin-films and it’s applications in the twenty first century. It introduces the concept of thin-film characterization and interference. Thin film characterization involves ensuring that the coatings produced on the thin film has characteristics specific to the technological demand of certain industries. It briefly describes the principle and working of the characterizing scheme used by the author, namely, Fabry-Perot interferometer. The thin film deposition process used in this project is Spin coating. The various samples of glass slides used as a substrate are coated with Photoresist Shipley 1805 for different spin speed (2000-6000) rpm. Then, the project proceeds to characterize the obtained samples through a n experiment described in Chapter 3 which uses the Fabry-Perot interferometer. Following this, signal processing is performed to obtain the desired results for each spin speed such as the reflectance versus the frequencies plot. The thesis develops a simplified way to compare the plot of frequency periods versus spin speeds against the plot generated using the standard datasheet of Microposit Shipley S1800 series of Photoresists. The plots are quite different of the experiment and the standard due to certain limitations of the process, which is further discussed in the results section of Chapter 4.
Year2015
Corresponding Series Added EntryAsian Institute of Technology. Caps. Proj. ; no. EL-15-02
TypeProject
SchoolSchool of Engineering and Technology (SET)
DepartmentBachelor Degree
Academic Program/FoSElectronic Engineering (EL)
Chairperson(s)Mohammed, Waleed S. ;
Examination Committee(s)Mongkol Ekpanyapong;Teerapat Sa-nguankotchakorn;
DegreeCapstone Project (B.Sc.)-Asian Institute of Technology, 2015


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