The effect of metal electrodes and deposition angle on linearity of sculptured TiO2 humidity microsensors | |
| Author | Phenthai Phinmuang |
| Call Number | AIT Diss. no.ISE-24-01 |
| Subject(s) | Titanium dioxide Engineering-Materials Thin films Nanoscience |
| Note | A dissertation submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Microelectronics |
| Publisher | Asian Institute of Technology |
| Abstract | In this work, the linearity and sensitivity characteristics of capacitive-based titanium dioxide (TiO2) humidity microsensors with various electrode materials have been studied. The TiO2 thin films were produced using glancing angle deposition (GLAD) electron beam evaporator on either Ti or TiN microinterdigitated structure as contact electrodes. Using a field emission scanning electron microscope (FE-SEM), the produced thin films’ crystallinity and surface morphology were evaluated. Additionally, the porous-like nanocrystalline TiO2 films sculptured by GLAD and the anatase phase structure of TiO2 thin films have also been investigated. By using the current-voltage and capacitance-voltage measurements, the sensitivity of TiO2/Ti electrode and TiO2/TiN-electrode humidity sensors have been determined. As a result, the capacitive sensors using Ti electrodes exhibit superior linearity and sensitivity when compared to the sensors using TiN electrodes. For the sensors with Ti microinterdigitated electrodes and porous-like nanocrystalline TiO2 films grown at 70 glancing angle, the sensitivity of 1.17×10-11 F/%RH and the linearity of 0.97 could be achieved. |
| Year | 2024 |
| Type | Dissertation |
| School | School of Engineering and Technology |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Mongkol Ekpanyapong |
| Examination Committee(s) | Weerakorn Ongsakul;Chaklam Silpasuwanchai |
| Scholarship Donor(s) | Thailand Graduate Institute of Science and Technology (TGIST);AIT Fellowship |
| Degree | Thesis (Ph. D.) - Asian Institute of Technology, 2024 |